6/20/2011	3:06:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/20/2011	3:06:49 PM	Recipe started at 3:06 PM
6/20/2011	3:06:49 PM	H2 valve closed
6/20/2011	3:06:49 PM	BCl3 valve closed
6/20/2011	3:06:49 PM	PH3 valve closed
6/20/2011	3:06:49 PM	SiCl4 pre valve closed
6/20/2011	3:06:49 PM	SiCl4 post valve closed
6/20/2011	3:06:49 PM	Main Vac valve closed
6/20/2011	3:06:49 PM	Bypass valve closed
6/20/2011	3:06:49 PM	Bubbler valve closed
6/20/2011	3:06:49 PM	Helium valve opened
6/20/2011	3:06:49 PM	Helium MFC set to  500.000000
6/20/2011	3:06:49 PM	H2 MFC set to  0.000000
6/20/2011	3:06:49 PM	BCl3 MFC set to  0.000000
6/20/2011	3:06:49 PM	PHl3 MFC set to  0.000000
6/20/2011	3:06:49 PM	SiCl4 MFC set to  0.000000
6/20/2011	3:06:49 PM	Bypass solenoid MFC set to  0.000000
6/20/2011	3:06:49 PM	Tube furnace set to 0
6/20/2011	3:08:08 PM	Helium valve closed
6/20/2011	3:08:08 PM	H2 valve closed
6/20/2011	3:08:08 PM	BCl3 valve closed
6/20/2011	3:08:08 PM	PH3 valve closed
6/20/2011	3:08:08 PM	SiCl4 pre valve closed
6/20/2011	3:08:08 PM	SiCl4 post valve closed
6/20/2011	3:08:08 PM	Main Vac valve closed
6/20/2011	3:08:08 PM	Bypass valve closed
6/20/2011	3:08:08 PM	Bubbler valve closed
6/20/2011	3:08:08 PM	Helium MFC set to  0.000000
6/20/2011	3:08:08 PM	H2 MFC set to  0.000000
6/20/2011	3:08:08 PM	BCl3 MFC set to  0.000000
6/20/2011	3:08:08 PM	PHl3 MFC set to  0.000000
6/20/2011	3:08:08 PM	SiCl4 MFC set to  0.000000
6/20/2011	3:08:08 PM	Bypass solenoid MFC set to  0.000000
6/20/2011	3:08:08 PM	Tube furnace set to 0
6/20/2011	3:08:08 PM	Run finished at 3:08 PM
6/20/2011	3:08:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/20/2011	3:10:51 PM	Main Vac valve opened
6/20/2011	3:10:58 PM	Main Vac valve closed
6/20/2011	3:19:22 PM	Main Vac valve opened
6/20/2011	3:19:36 PM	Main Vac valve closed
6/20/2011	3:19:54 PM	Main Vac valve opened
6/20/2011	3:19:55 PM	Main Vac valve closed
6/20/2011	3:19:58 PM	Main Vac valve opened
6/20/2011	3:20:00 PM	Main Vac valve closed
6/20/2011	3:20:03 PM	Main Vac valve opened
6/20/2011	3:20:04 PM	Main Vac valve closed
6/20/2011	3:20:07 PM	Main Vac valve opened
6/20/2011	3:20:09 PM	Main Vac valve closed
6/20/2011	3:35:38 PM	Main Vac valve opened
6/20/2011	4:01:45 PM	Main Vac valve closed
6/20/2011	4:09:12 PM	Program exited cleanly
6/20/2011	5:33:57 PM	Program started normally
6/20/2011	5:33:57 PM	Helium valve closed
6/20/2011	5:33:57 PM	H2 valve closed
6/20/2011	5:33:57 PM	BCl3 valve closed
6/20/2011	5:33:57 PM	PH3 valve closed
6/20/2011	5:33:57 PM	SiCl4 pre valve closed
6/20/2011	5:33:57 PM	SiCl4 post valve closed
6/20/2011	5:33:57 PM	Main Vac valve closed
6/20/2011	5:33:57 PM	Bypass valve closed
6/20/2011	5:33:57 PM	Bubbler valve closed
6/20/2011	5:33:57 PM	Helium MFC set to  0.000000
6/20/2011	5:33:57 PM	H2 MFC set to  0.000000
6/20/2011	5:33:57 PM	BCl3 MFC set to  0.000000
6/20/2011	5:33:57 PM	PHl3 MFC set to  0.000000
6/20/2011	5:33:57 PM	SiCl4 MFC set to  0.000000
6/20/2011	5:33:57 PM	Bypass solenoid MFC set to  760.000000
6/20/2011	5:34:02 PM	Error in setting the tube furnace  to 0
6/20/2011	5:34:04 PM	Bypass valve opened
6/20/2011	5:34:04 PM	Bypass valve closed
6/20/2011	5:34:27 PM	Program started after a nonstandard shutdown
6/20/2011	5:34:27 PM	Helium valve closed
6/20/2011	5:34:27 PM	H2 valve closed
6/20/2011	5:34:27 PM	BCl3 valve closed
6/20/2011	5:34:27 PM	PH3 valve closed
6/20/2011	5:34:27 PM	SiCl4 pre valve closed
6/20/2011	5:34:27 PM	SiCl4 post valve closed
6/20/2011	5:34:27 PM	Main Vac valve closed
6/20/2011	5:34:27 PM	Bypass valve closed
6/20/2011	5:34:27 PM	Bubbler valve closed
6/20/2011	5:34:27 PM	Helium MFC set to  0.000000
6/20/2011	5:34:27 PM	H2 MFC set to  0.000000
6/20/2011	5:34:27 PM	BCl3 MFC set to  0.000000
6/20/2011	5:34:27 PM	PHl3 MFC set to  0.000000
6/20/2011	5:34:27 PM	SiCl4 MFC set to  0.000000
6/20/2011	5:34:27 PM	Bypass solenoid MFC set to  760.000000
6/20/2011	5:34:28 PM	Tube furnace set to 0
6/20/2011	5:34:32 PM	Bypass valve opened
6/20/2011	5:34:36 PM	Bypass valve closed
6/20/2011	5:34:41 PM	Bypass valve opened
6/20/2011	5:34:44 PM	Bypass valve closed
6/20/2011	5:34:52 PM	Bypass valve opened
6/20/2011	5:34:53 PM	Bypass valve closed
6/20/2011	5:35:05 PM	Bypass valve opened
6/20/2011	5:35:06 PM	Bypass valve closed
6/20/2011	5:35:07 PM	Bypass valve opened
6/20/2011	5:35:08 PM	Bypass valve closed
6/20/2011	5:35:10 PM	Bypass valve opened
6/20/2011	5:35:12 PM	Bypass valve closed
6/20/2011	5:35:16 PM	Program exited cleanly
6/20/2011	5:47:00 PM	Program started normally
6/20/2011	5:47:00 PM	Helium valve closed
6/20/2011	5:47:00 PM	H2 valve closed
6/20/2011	5:47:00 PM	BCl3 valve closed
6/20/2011	5:47:00 PM	PH3 valve closed
6/20/2011	5:47:00 PM	SiCl4 pre valve closed
6/20/2011	5:47:00 PM	SiCl4 post valve closed
6/20/2011	5:47:00 PM	Main Vac valve closed
6/20/2011	5:47:00 PM	Bypass valve closed
6/20/2011	5:47:00 PM	Bubbler valve closed
6/20/2011	5:47:00 PM	Helium MFC set to  0.000000
6/20/2011	5:47:00 PM	H2 MFC set to  0.000000
6/20/2011	5:47:00 PM	BCl3 MFC set to  0.000000
6/20/2011	5:47:00 PM	PHl3 MFC set to  0.000000
6/20/2011	5:47:00 PM	SiCl4 MFC set to  0.000000
6/20/2011	5:47:00 PM	Bypass solenoid MFC set to  760.000000
6/20/2011	5:47:00 PM	Tube furnace set to 0
6/20/2011	5:47:01 PM	Bypass valve opened
6/20/2011	5:47:19 PM	Bypass valve closed
6/20/2011	5:48:03 PM	Bypass valve opened
6/20/2011	5:48:03 PM	Bypass valve closed
6/20/2011	5:48:03 PM	Bypass valve opened
6/20/2011	5:50:00 PM	Bypass valve closed
6/20/2011	5:50:04 PM	Bypass valve opened
6/20/2011	5:50:05 PM	Bypass valve closed
6/20/2011	5:50:12 PM	Bypass valve opened
6/20/2011	5:50:13 PM	Bypass valve closed
6/20/2011	5:50:15 PM	Bypass valve opened
6/20/2011	5:50:17 PM	Bypass valve closed
6/20/2011	5:50:27 PM	Bypass valve opened
6/20/2011	5:50:31 PM	Bypass valve closed
6/20/2011	5:50:33 PM	Bypass valve opened
6/20/2011	5:50:35 PM	Bypass valve closed
6/20/2011	5:50:37 PM	Bypass valve opened
6/20/2011	5:50:38 PM	Bypass valve closed
6/20/2011	5:50:42 PM	Bypass valve opened
6/20/2011	5:51:16 PM	Bypass valve closed
6/20/2011	5:51:41 PM	Bypass valve opened
6/20/2011	5:51:53 PM	Bypass valve closed
6/20/2011	5:52:34 PM	Bypass valve opened
6/20/2011	5:52:37 PM	Bypass valve closed
6/20/2011	5:52:49 PM	Bypass valve opened
6/20/2011	5:52:50 PM	Bypass valve closed
6/20/2011	5:52:51 PM	Bypass valve opened
6/20/2011	5:53:12 PM	Bypass valve closed
